| Title: | 極大型積體電路元件相關耐火金屬化物及電介質技術 ULSI Devices Related Refractory Metals and Dielectrics Technologies |
| Authors: | 張國明 CHANG KOW-MING 國立交通大學電子工程學系 |
| Keywords: | 極大型積體電路;縱橫比;電子迴旋共振化學氣相沈積;鎢化學氣相沈積;VLSI;Aspect ratio;ECR-CVD;CVD-W |
| Issue Date: | 1996 |
| Gov't Doc #: | NSC85-2215-E009-061 |
| URI: | http://hdl.handle.net/11536/95802 https://www.grb.gov.tw/search/planDetail?id=234690&docId=43085 |
| Appears in Collections: | Research Plans |
