| Title: | 微機電系統校際整合研究---子計畫一：電容性微感器及微控器元件結構設計與製造 Capacitive Microsensors and Microactuators Device Structure Design and Fabrication |
| Authors: | 張國明 CHANG KOW-MING 國立交通大學電子工程學系 |
| Keywords: | 微機電系統;微感測器;微致動器;微機電元件;MEMS;Microsensor;Microactuator;Microdevice |
| Issue Date: | 1996 |
| Gov't Doc #: | NSC85-2215-E009-029 |
| URI: | http://hdl.handle.net/11536/96117 https://www.grb.gov.tw/search/planDetail?id=234686&docId=43084 |
| Appears in Collections: | Research Plans |
