Browsing by Subject surface NH3 nitridation
Showing results 1 to 1 of 1
| Issue Date | Title | Author(s) |
|---|---|---|
| 1-Aug-2003 | High quality Al2O3IPD with NH3 surface nitridation | Chen, YY; Chien, CH; Lou, JC; 電子工程學系及電子研究所; Department of Electronics Engineering and Institute of Electronics |