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National Chiao Tung University Institutional Repository
Browsing by Author Cheng, Yuan-Chieh
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Issue Date
Title
Author(s)
2015
The study of compensative structure assisted convex and concave corner structures etching by Inductively Coupled Plasma-Reactive Ion Etch (ICP-RIE)
Lin, Yu-Hsin
;
Cheng, Yuan-Chieh
;
Chu, Nien-Nan
;
Hsu, Wensyang
;
Tang, Yu-Hsiang
;
Chen, Po-Li
;
Yang, Chih-Chung
;
Hsiao, Ming-Hua
;
Hsiao, Chien-Nan
;
機械工程學系
;
Department of Mechanical Engineering
