標題: A simple and low-cost method to fabricate TFTs with poly-Si nanowire channel
作者: Lin, HC
Lee, MH
Su, CJ
Huang, TY
Lee, CC
Yang, YS
生物科技學系
電子工程學系及電子研究所
Department of Biological Science and Technology
Department of Electronics Engineering and Institute of Electronics
關鍵字: nanowires;poly-Si;sensor device;thin-film transistors (TFTs)
公開日期: 1-九月-2005
摘要: A very simple and low-cost scheme is proposed for fabricating thin-film transistors with poly-Si nanowire (NW) channels. In this scheme, the poly-Si NW channel is formed by cleverly employing the poly-Si sidewall spacer technique. In addition, the poly-Si NW channel is genuinely exposed to the environment after the poly-Si sidewall spacer formation in the new scheme. This unique feature, together with its simplicity and low-cost, makes this approach very suitable for applications and manufacturing of bio-logic sensing devices. Good device performance is demonstrated in this letter.
URI: http://dx.doi.org/10.1109/LED.2005.853669
http://hdl.handle.net/11536/13323
ISSN: 0741-3106
DOI: 10.1109/LED.2005.853669
期刊: IEEE ELECTRON DEVICE LETTERS
Volume: 26
Issue: 9
起始頁: 643
結束頁: 645
顯示於類別:期刊論文


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