標題: | A simple and low-cost method to fabricate TFTs with poly-Si nanowire channel |
作者: | Lin, HC Lee, MH Su, CJ Huang, TY Lee, CC Yang, YS 生物科技學系 電子工程學系及電子研究所 Department of Biological Science and Technology Department of Electronics Engineering and Institute of Electronics |
關鍵字: | nanowires;poly-Si;sensor device;thin-film transistors (TFTs) |
公開日期: | 1-九月-2005 |
摘要: | A very simple and low-cost scheme is proposed for fabricating thin-film transistors with poly-Si nanowire (NW) channels. In this scheme, the poly-Si NW channel is formed by cleverly employing the poly-Si sidewall spacer technique. In addition, the poly-Si NW channel is genuinely exposed to the environment after the poly-Si sidewall spacer formation in the new scheme. This unique feature, together with its simplicity and low-cost, makes this approach very suitable for applications and manufacturing of bio-logic sensing devices. Good device performance is demonstrated in this letter. |
URI: | http://dx.doi.org/10.1109/LED.2005.853669 http://hdl.handle.net/11536/13323 |
ISSN: | 0741-3106 |
DOI: | 10.1109/LED.2005.853669 |
期刊: | IEEE ELECTRON DEVICE LETTERS |
Volume: | 26 |
Issue: | 9 |
起始頁: | 643 |
結束頁: | 645 |
顯示於類別: | 期刊論文 |