標題: A Decouple structured Gyroscope with Integrated Readout Circuit on Standard 0.18 mu m 1P6M CMOS Technology
作者: Chien, Chun-Lin
Wen, Kuei-Ann
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: CMOS-MEMS;Gyroscope;readout circuit;capacitive sensing
公開日期: 2016
摘要: A dual proof-mass structured gyroscope integrated with readout circuit have been proposed. The C to V stage is achieved by the differential difference amplifier (DDA) which has advantages of high gain, low temperature and process dependence. Chopper Stabilization (CHS) and Corrected Double Sampling (CDS) is used to suppress low-frequency noise and compensate DC offset. The gain of DDA is 25dB and power consumption of total readout circuit is 791 mu W. The mems part is fabricated with standard 1P6M 0.18um CMOS process and the mechanical sensitivity is 11.26aF/degrees/s. Chip area is 1.9x1.7mm(2).
URI: http://hdl.handle.net/11536/134582
ISBN: 978-1-5090-3219-8
ISSN: 2163-9612
期刊: 2016 INTERNATIONAL SOC DESIGN CONFERENCE (ISOCC)
起始頁: 15
結束頁: 16
顯示於類別:會議論文