標題: | Structure design of a 2-D high-aspect-ratio resonant microbearn accelerometer |
作者: | Hwang, DH Chin, KP Lo, YC Hsu, WS 機械工程學系 Department of Mechanical Engineering |
關鍵字: | resonant;accelerometer;frequency shift;high aspect ratio;decouple;cross talk |
公開日期: | 1-七月-2005 |
摘要: | An accelerometer with concise structure having a resonant microbeam to measure 2-D acceleration is proposed. This structure is configured with a central proof mass suspended by four symmetrical and orthogonal high-aspect-ratio (HAR) microbeams. This dual-axis design is able to decouple a two-axis signal from a 2-D acceleration. An analytical model relating the linear relationship between the acceleration and the associated resonant frequency shift of microbeam is derived, and a finite element analysis (FEA) is also performed to confirm this model. The FEA result also shows that there is little cross talk between x and y directions of measurement, meaning that this structure is able to clecouple a planar 2-D acceleration into two independent acceleration components, and therefore the 1-D analytical model can be used to evaluate the 2-D acceleration on the x-y plane. In addition, the model is verified by testing results of one conventional dual-axis natural frequency shifted microaccelerometer (DFSM). The simulation result also shows that the sensitivity of the proposed HAR accelerometer is triple that of a conventional DFSM. (c) 2005 Society ofPhoto-Optical Instrumentation Engineers. |
URI: | http://dx.doi.org/10.1117/1.2037070 http://hdl.handle.net/11536/13526 |
ISSN: | 1537-1646 |
DOI: | 10.1117/1.2037070 |
期刊: | JOURNAL OF MICROLITHOGRAPHY MICROFABRICATION AND MICROSYSTEMS |
Volume: | 4 |
Issue: | 3 |
結束頁: | |
顯示於類別: | 期刊論文 |