源/汲極活化與磷離子擴散行為對連續波雷射結 晶之N型多晶鍺薄膜電晶體之研究

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DC Field	Value	Language
dc.contributor.author	梁皓翔	zh_TW
dc.contributor.author	鄭晃忠	zh_TW
dc.contributor.author	Liang, Hao-Hsiang	en_US
dc.contributor.author	Cheng, Huang-Chung	en_US
dc.date.accessioned	2018-01-24T07:41:58Z	-
dc.date.available	2018-01-24T07:41:58Z	-
dc.date.issued	2017	en_US
dc.identifier.uri	http://etd.lib.nctu.edu.tw/cdrfb3/record/nctu/#GT070450166	en_US
dc.identifier.uri	http://hdl.handle.net/11536/142264	-
dc.language.iso	en_US	en_US
dc.subject	磷離子擴散	zh_TW
dc.subject	多晶鍺薄膜電晶體	zh_TW
dc.subject	連續波雷射結晶	zh_TW
dc.subject	源/汲極活化	zh_TW
dc.subject	綠光奈秒脈衝雷射退火	zh_TW
dc.subject	Phosphorus Diffusion	en_US
dc.subject	Polycrystalline-Germanium Thin-Film Transistors	en_US
dc.subject	Continuous Wave Laser Crystallization	en_US
dc.subject	green nano-second laser annealing	en_US
dc.title	源/汲極活化與磷離子擴散行為對連續波雷射結晶之N型多晶鍺薄膜電晶體之研究	zh_TW
dc.title	Study on the S/D Activation and Phosphorus Diffusion Condition for the N-Channel Polycrystalline-Germanium Thin-Film Transistors via Continuous Wave Laser Crystallization	en_US
dc.type	Thesis	en_US
dc.contributor.department	電子研究所	zh_TW
Appears in Collections:	Thesis