標題: Optimization of the Sputtering Process Parameters of AZO Films with Multiple Quality Characteristics
作者: Wen, Dong-Cherng
Hsu, Chun-Yao
Chiou, Ai-Huei
機械工程學系
Department of Mechanical Engineering
關鍵字: AZO films;Magnetron sputtering;Electrical resistivity;Optical transmittance
公開日期: 1-一月-2012
摘要: Aluminum-doped zinc oxide (AZO) films were deposited on polyethylene terephthalate (PET) by radio frequency magnetron sputtering. The influence of the various deposition parameters (R.F. power, substrate-to-target distance, substrate temperature, deposition time) on electrical, morphological and optical properties of AZO/PET films was investigated. The use of grey-based Taguchi method to determine the optimization of the process parameters by considering multiple performance characteristics has been reported. The electrical resistivity and the average transmittance of the AZO films were improved by increasing the substrate temperature. Finds based on the grey relational analysis show that the lowest electrical resistivity of AZO films to be about 1.6 x 10(-3) Omega-cm, and visible range transmittance about 80%.
URI: http://dx.doi.org/10.4028/www.scientific.net/AMR.512-515.1961
http://hdl.handle.net/11536/146336
ISSN: 1022-6680
DOI: 10.4028/www.scientific.net/AMR.512-515.1961
期刊: RENEWABLE AND SUSTAINABLE ENERGY II, PTS 1-4
Volume: 512-515
起始頁: 1961
顯示於類別:會議論文