標題: Enhancement of Surface Chemical and Physical Properties of Germanium-Sulfur Thin Film Using a Water-Supplemented Carbon Dioxide Supercritical Fluid Treatment Technique
作者: Yang, Chih-Cheng
Chen, Po-Hsun
Shih, Chih-Cheng
Wang, Ming-Hui
Tsai, Tsung-Ming
Zheng, Hao-Xuan
Chen, Wen-Chung
Chen, Min-Chen
Huang, Hui-Chun
Ma, Xiao-Hua
Hao, Yue
Huang, Jen-Wei
Sze, Simon M.
Chang, Ting-Chang
電子工程學系及電子研究所
Department of Electronics Engineering and Institute of Electronics
關鍵字: germanium-sulfur (GeS);oxidation;resistance switching (RS);resistive random access memory (RRAM);supercritical fluid (SCF)
公開日期: 9-十一月-2018
摘要: In this study, an oxidation treatment technique suitable for the material and electronic device applications proceeding at low temperature (only 80 degrees C) and high pressure (3000 psi) utilizing a carbon dioxide (CO2) supercritical fluid (SCF), also known as scCO(2), which is supplemented with water molecules, is reported. To demonstrate the possible effects on material and devices for the proposed SCF treatment, an amorphous germanium-sulfur (GeS) thin film and a GeS-based resistance random access memory (RRAM) device are prepared. After the SCF treatment, electrical measurements confirm that the GeS-based RRAM device exhibits a lower forming voltage, more stable resistance switching characteristics, and higher concentration distributions of high and low resistance states when compared to the device without SCF treatment. As for the material effects, both chemical and physical properties are examined based on material analyses results. It is concluded that the original amorphous GeS thin film transforms to a polycrystallized GeO film, confirmed by a reaction model for the SCF treatment illustrating possible oxidation and crystallization effects induced by this SCF treatment. This water-enhanced scCO(2) SCF treatment technique, thus, shows its capability as a feasible synthetic method for material modification as well as suitability for device level applications.
URI: http://dx.doi.org/10.1002/admi.201801105
http://hdl.handle.net/11536/148422
ISSN: 2196-7350
DOI: 10.1002/admi.201801105
期刊: ADVANCED MATERIALS INTERFACES
Volume: 5
顯示於類別:期刊論文