Flip-Up Micro Scanning Mirror with Vertical Comb Drive Assembled by Simple Push Operations

Title:	Flip-Up Micro Scanning Mirror with Vertical Comb Drive Assembled by Simple Push Operations
Authors:	Chen, Cheng-An Chiu, Yi 電機工程學系 Department of Electrical and Computer Engineering
Keywords:	scanning mirror;vertical comb drive;flip-up;assembly
Issue Date:	2011
Abstract:	A novel flip-up micro scanning mirror is fabricated in SOI substrates with SU8 vertical comb drive actuators. The device is assembled by simple push operation. The design and fabrication of the device is presented.
URI:	http://hdl.handle.net/11536/14870
ISBN:	978-1-4577-0336-2
Journal:	OMN2011: 16TH INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS
Begin Page:	189
End Page:	190
Appears in Collections:	Conferences Paper

APA	Chen, C., & Chiu, Y. (2011). Flip-Up Micro Scanning Mirror with Vertical Comb Drive Assembled by Simple Push Operations. WOS:000297850100080.
Bibtex	@article{Chen2011Flip-Up, title={Flip-Up Micro Scanning Mirror with Vertical Comb Drive Assembled by Simple Push Operations}, author={Chen, Cheng-An and Chiu, Yi}, journal={WOS:000297850100080}, year={2011}, url={https://ir.lib.nycu.edu.tw/handle/11536/14870}, }