標題: Design and fabrication of a cascaded electro-thermal bimorph actuator
作者: Lin, Chen-Hsuan
Yeh, Cheng-Chi
Hsu, Chen-Peng
Hsu, Wensyang
機械工程學系
Department of Mechanical Engineering
關鍵字: thermal;bimorph;cascaded;actuator;heating region
公開日期: 2005
摘要: Here a cascaded bimorph actuator is proposed by integrating several novel actuation units to accumulate the vertical displacements. Each actuation unit comprises two types of bimorph beams and a constraint bar, and both beams will stretch outward with respect to the constraint bar while heating. In comparison with other three conventional bimorph actuator designs at the same device size, it is shown that the proposed design can provide larger vertical displacement. The proposed cascaded bimorph actuator is fabricated by surface micromachining technique and released by XeF2 silicon isotropic etching. Whole suspended structure consisting of the polysilicon and the aluminum is around 510 x 400 mu m(2) with four actuation units. The resistance is about 650 Q. In testing, the fabricated device is shown to provide reversible vertical displacement of 22.5 mu m at 4.5 V, and the operating temperature is measured by an infrared thermal microscope (InfraScope II, QFI). The calibrated maximum temperatures are compared with simulated results by ANSYS 6.0 in good agreement. It is found that the maximum temperature is 147 degrees C when the input voltage is 4.5 dc volts, and the maximum temperature is below 400 degrees C even at 10 V. However, it is found that the residual stress in the suspended structure will affect the vertical displacement of the device.
URI: http://hdl.handle.net/11536/17606
ISBN: 0-7918-4224-X
期刊: Micro-Electro-Mechanical Systems - 2005
Volume: 7
起始頁: 433
結束頁: 438
顯示於類別:會議論文