標題: Prioritized automatic material handling services in 300mm foundry manufacturing
作者: Wang, CN
Liao, DY
交大名義發表
National Chiao Tung University
關鍵字: 300mm manufacturing;wafer foundry;AMHS;OHT dispatching;hot lot
公開日期: 2002
摘要: This paper present's a heuristic approach for differentiating material handling services in a highly automated environment of 300mm foundry manufacturing. A preemptive dispatching policy, Highest Priority Job (HPJ) first, is proposed to expedite the. movement of high priority products while keeping acceptable the incurred delays on regular ones. Simulation experiments based on-realistic data from a local 300mm foundry fab are conducted. Numerical results demonstrate that the proposed policy is excellent in reducing the transport delays of high priority products to some extremes. Features of HPJ are also discussed.
URI: http://hdl.handle.net/11536/18932
ISBN: 0-7803-7604-8
期刊: 2002 SEMICONDUCTOR MANUFACTURING TECHNOLOGY WORKSHOP
起始頁: 109
結束頁: 114
顯示於類別:會議論文