標題: Fabrication and characterization of spherical polycrystalline diamond emitter arrays
作者: Chen, CF
Huang, WH
材料科學與工程學系
Department of Materials Science and Engineering
關鍵字: diamond;field emitter array;emission current;microwave plasma chemical vapor deposition
公開日期: 31-十月-1997
摘要: In this work, a high density of spherical polycrystalline diamond field emitter arrays (SPD-FEAs) were fabricated, using microwave plasma chemical vapor deposition (MPCVD) method. Results obtained from the current-voltage (I-e-V-a) characteristics indicate that the impurities heavily influence electron emission. In addition, the emissions current of the phosphorus-doped SDP-FEAs appears to be 25 times lar er than the boron-doped and 120 times larger than the undoped SPD-FEAs. (C) 1997 Elsevier Science S.A.
URI: http://dx.doi.org/10.1016/S0040-6090(97)00671-8
http://hdl.handle.net/11536/244
ISSN: 0040-6090
DOI: 10.1016/S0040-6090(97)00671-8
期刊: THIN SOLID FILMS
Volume: 308
Issue: 
起始頁: 85
結束頁: 89
顯示於類別:會議論文


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