標題: Variable optical attenuator with tunable nonsmooth curved mirror
作者: Lin, CH
Wen, SY
Hsu, WY
機械工程學系
Department of Mechanical Engineering
關鍵字: VOA;enhancement;optical;attenuation;nonsmooth;curved mirror;MEMS
公開日期: 1-十一月-2004
摘要: The attenuate effect of a variable optical attenuator (VOA) with a tunable nonsmooth curved mirror is fabricated and investigated experimentally and analytically. The working principle of this VOA is based on tuning the reflective mirror membrane into the nonsmooth curved mirror to enhance the optical attenuation, compared with that of the smooth curved mirror. The attenuation depending on the radius of curvature in a smooth concave mirror is simulated. Also, the attenuation tests on smooth and nonsmooth concave mirrors are conducted experimentally. The mirror membrane of the proposed VOA can provide not only the curved shape, but also a nonsmooth shape at the same time in the mirror membrane. By comparing the experimental results between the smooth and nonsmooth curved mirrors, the attenuation is shown to be enhanced at least 60% by the nonsmooth effect when the radius of curvature is smaller than 50 mm. The mirror membrane combining gold and low-stress nitride using back-side etching is sufficiently flat to provide an insertion loss of 0.53dB, and more than 40dB attenuation after deformation.
URI: http://dx.doi.org/10.1143/JJAP.43.7764
http://hdl.handle.net/11536/25684
ISSN: 0021-4922
DOI: 10.1143/JJAP.43.7764
期刊: JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
Volume: 43
Issue: 11A
起始頁: 7764
結束頁: 7768
顯示於類別:期刊論文


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