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dc.contributor.authorTsai, CJen_US
dc.contributor.authorChang, CTen_US
dc.contributor.authorLiu, TWen_US
dc.contributor.authorHuang, CCen_US
dc.contributor.authorChien, CLen_US
dc.contributor.authorChein, HMen_US
dc.date.accessioned2014-12-08T15:39:38Z-
dc.date.available2014-12-08T15:39:38Z-
dc.date.issued2004-02-01en_US
dc.identifier.issn1352-2310en_US
dc.identifier.urihttp://dx.doi.org/10.1016/j.atmosenv.2003.10.002en_US
dc.identifier.urihttp://hdl.handle.net/11536/27067-
dc.description.abstractLarge amount of acidic liquids, such as H2SO4, HF, HCl and HNO3, and basic NH3 liquid are used in high-tech industries in cleaning and etching processes in the Hsinchu Science-Based Industrial Park in Taiwan. The industries use packed towers (or scrubbers) to control emission of these inorganic pollutants, in which acidic gases but not particles are regulated by the Taiwan EPA's strict emission standard for semiconductor industry. To understand whether the emission standard is met and to investigate the emission rates, emission profiles, emission factors, and control efficiencies of various gaseous/aerosol species, measurement of pollutants before and after the packed towers was conducted using a sensitive porous metal sampler during January 2001 to February 2003. Results show that the pollutants are mainly in the gaseous phase, and the control efficiency of pollutants is low and variable when the inlet concentration is low. In addition to the control efficiency data, emission factors before the control device for various gas and particle species have also been developed for estimating the emission rates. (C) 2003 Elsevier Ltd. All rights reserved.en_US
dc.language.isoen_USen_US
dc.subjectacidic aerosolsen_US
dc.subjectemission factoren_US
dc.subjectair pollution controlen_US
dc.subjectsemiconductor manufacturingen_US
dc.titleEmission characteristics and control efficiency of acidic and basic gases and aerosols from packed towersen_US
dc.typeArticleen_US
dc.identifier.doi10.1016/j.atmosenv.2003.10.002en_US
dc.identifier.journalATMOSPHERIC ENVIRONMENTen_US
dc.citation.volume38en_US
dc.citation.issue4en_US
dc.citation.spage643en_US
dc.citation.epage646en_US
dc.contributor.department環境工程研究所zh_TW
dc.contributor.departmentInstitute of Environmental Engineeringen_US
dc.identifier.wosnumberWOS:000188702200012-
dc.citation.woscount8-
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