標題: | Hot filament for in situ catalyst supply in the chemical vapor deposition growth of carbon nanotubes |
作者: | Chen, CF Lin, CL Wang, CM 材料科學與工程學系 Department of Materials Science and Engineering |
關鍵字: | carbon nanotubes;hot filament chemical vapor deposition;pyrolysis;catalyst |
公開日期: | 15-一月-2002 |
摘要: | A simplified chemical vapor deposition (CVD) method is described for in situ synthesis of multiwalled carbon nanotubes. The synthesis apparatus is similar to, that used to deposit CVD diamond. However, an Fe-Cr wire is selected and coiled as the filament to grow nanotubes. The tubes crow because the filament acts as both a heat source for pyrolysis, and a source of metal for the catalyst. The evaporated metal atoms can be considered to catalyze the growth of carbon nanotubes. The system has the potential to inexpensively synthesize large amounts of nanotubes continuously by combining physical and chemical vapor deposition. |
URI: | http://dx.doi.org/10.1143/JJAP.41.L67 http://hdl.handle.net/11536/29066 |
ISSN: | 0021-4922 |
DOI: | 10.1143/JJAP.41.L67 |
期刊: | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS |
Volume: | 41 |
Issue: | 1AB |
起始頁: | L67 |
結束頁: | L69 |
顯示於類別: | 期刊論文 |