A novel cross-coupled inter-poly-oxide capacitor for mixed-mode CMOS processes

標題:	A novel cross-coupled inter-poly-oxide capacitor for mixed-mode CMOS processes
作者:	Chen, MJ Hou, CS 電子工程學系及電子研究所 Department of Electronics Engineering and Institute of Electronics
關鍵字:	analog circuits;capacitor;CMOS;mixed-mode;poly depletion;voltage coefficient of capacitance
公開日期:	1-七月-1999
摘要:	The inter-poly-oxide (IPO) capacitor is one of the main elements in present mixed-mode CMOS process technologies, However, the phenomenon of poly depletion causes a significant change in the measured capacitance with applied voltage, This effect, expressed in terms of the voltage coefficient of capacitance (VCC), can seriously deteriorate analog precision. In this letter, a novel cross-coupled scheme is proposed for the IPO capacitors. The resulting VCC has a very low measured value of 2 ppm/V in a 0.35-mu m standard mixed-mode CMOS process, achieved without any unconventional approaches.
URI:	http://dx.doi.org/10.1109/55.772376 http://hdl.handle.net/11536/31267
ISSN:	0741-3106
DOI:	10.1109/55.772376
期刊:	IEEE ELECTRON DEVICE LETTERS
Volume:	20
Issue:	7
起始頁:	360
結束頁:	362
顯示於類別：	期刊論文

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