製備石墨烯結合金屬材料之電漿波導於兆赫波段的光電應用

Abstract

本論文製作結構上為單層石墨烯覆蓋於矽晶圓光柵結構之電漿波導，再利用兆赫輻射時域分析頻譜量測系統進行量測，期待能觀察到表面電漿共振現象(surface plasmon oscillation)，進而了解此電漿波導之光電性質及應用。我們先以理論樣品模型預測表面電漿共振頻率，再進行實驗以觀察是否符合理論預測。實際樣品為利用半導體製程在六吋矽晶圓上製作光柵結構，待完成後以雷射切割的方式將六吋矽晶圓切割成128個1 cm x 1 cm之單一樣品，接下來覆蓋上以化學氣相沉積法製作之單層石墨烯，完成樣品製備。石墨烯具有良好的載子遷移率(mobility)，此性質配合具有光柵結構的基板可在特定入射光頻率下激發表面電漿共振現象，而透過兆赫輻射時域分析頻譜量測系統可測得入射光穿透樣品後的時域、頻域暫態波形，經過處理後可得穿透率對入射光頻率之關係圖，進而得知表面電漿共振頻率，最後和理論預測做比較，確認結果是否符合預期。

In this thesis, we expect to understand the optoelectronic properties of graphene by preparation of graphene-metal plasmonic waveguide and study the surface plasmon oscillation by Terahertz Time-Domain Spectroscopy meacurement. First, we predict the frequency of surface plasmon oscillation by theory. Then we can check the result by experiment. The grating structure was prepared by Semiconductor Manufacturing Technology. After all processes done on 6” silicon wafer, we chould cut it to 1cm x 1cm size by laser cutting. Finally, we transfered a CVD monolayer graphene onto the grating structure, completed the sample. Graphene has very good performance on mobility. We can combine graphene with grating structure for research of surface plasmon oscillation. By Terahertz Time-Domain Spectroscopy meacurement, transmission of sample is available. Finally, we can analysis the data to obtain frequency of surface plasmon oscillation and compare it with theory.