標題: X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO(3) high-k dielectric prepared by sol-gel spin coating method
作者: Kao, Kuo-Hsing
Chuang, Shiow-Huey
Wu, Woei-Cherng
Chao, Tien-Sheng
Chen, Jian-Hao
Ma, Ming-Wen
Gao, Reui-Hong
Chiang, Michael Y.
電子物理學系
Department of Electrophysics
公開日期: 1-九月-2008
摘要: The characteristics of CoTiO(3) high-k dielectric prepared by sol-gel spin coating method had been demonstrated. High electrical permittivity (k similar to 40.2) of CoTiO(3) dielectric was extracted via the transmission electron microscopy image and capacitance-voltage curves. In addition, the valence band offset between thermal SiO(2) and spin-on CoTiO(3) was about 4.0 eV, which was detected by x-ray photoelectron spectroscopy. The band gaps of thermal SiO(2) and spin-on CoTiO(3) were 9.0 and 2.2 eV, respectively. Energy band alignment of spin-on CoTiO(3) directly with SiO(2) and indirectly with Si was determined in this work. (c) 2008 American Institute of Physics.
URI: http://dx.doi.org/10.1063/1.2978231
http://hdl.handle.net/11536/8370
ISSN: 0003-6951
DOI: 10.1063/1.2978231
期刊: APPLIED PHYSICS LETTERS
Volume: 93
Issue: 9
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