標題: | X-ray photoelectron spectroscopy energy band alignment of spin-on CoTiO(3) high-k dielectric prepared by sol-gel spin coating method |
作者: | Kao, Kuo-Hsing Chuang, Shiow-Huey Wu, Woei-Cherng Chao, Tien-Sheng Chen, Jian-Hao Ma, Ming-Wen Gao, Reui-Hong Chiang, Michael Y. 電子物理學系 Department of Electrophysics |
公開日期: | 1-九月-2008 |
摘要: | The characteristics of CoTiO(3) high-k dielectric prepared by sol-gel spin coating method had been demonstrated. High electrical permittivity (k similar to 40.2) of CoTiO(3) dielectric was extracted via the transmission electron microscopy image and capacitance-voltage curves. In addition, the valence band offset between thermal SiO(2) and spin-on CoTiO(3) was about 4.0 eV, which was detected by x-ray photoelectron spectroscopy. The band gaps of thermal SiO(2) and spin-on CoTiO(3) were 9.0 and 2.2 eV, respectively. Energy band alignment of spin-on CoTiO(3) directly with SiO(2) and indirectly with Si was determined in this work. (c) 2008 American Institute of Physics. |
URI: | http://dx.doi.org/10.1063/1.2978231 http://hdl.handle.net/11536/8370 |
ISSN: | 0003-6951 |
DOI: | 10.1063/1.2978231 |
期刊: | APPLIED PHYSICS LETTERS |
Volume: | 93 |
Issue: | 9 |
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顯示於類別: | 期刊論文 |