多軸觸覺式感測器之研究(II)

Title:	多軸觸覺式感測器之研究(II) A Study of Multi-Axial Tactile Sensors (II)
Authors:	黃宇中 HUANG YU-CHUNG 交通大學電子工程系
Keywords:	觸覺感測器;微機電系統;多軸式;溼式蝕刻;前置蝕刻;Tactile sensor;MEMS;Multi-axial;Wet etching;Pre-etching
Issue Date:	1999
Gov't Doc #:	NSC88-2218-E009-014
URI:	http://hdl.handle.net/11536/94344 https://www.grb.gov.tw/search/planDetail?id=418622&docId=74286
Appears in Collections:	Research Plans

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