Title: 熱導型加速計之研究
Study on an Accelerometer of Thermal Conductivity Type
Authors: 謝正雄
交通大學光電工程研究所
Keywords: 微機電系統;加速度計;熱導性;電阻式熱感測器;Micro electromechanical system (MEMS);Accelerometer;Thermal conductivity;Resistive thermal sensor
Issue Date: 1999
Gov't Doc #: NSC88-2218-E009-013
URI: http://hdl.handle.net/11536/94437
https://www.grb.gov.tw/search/planDetail?id=445250&docId=80679
Appears in Collections:Research Plans