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學術出版;;Publications
研究計畫;;Research Plans
隨機記憶體用高介電薄膜電容之研發(III)
隨機記憶體用高介電薄膜電容之研發(III)
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882215E009028.pdf
(349.79 KB)
Date
1999
Authors
林鵬
LIN PANG
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Abstract
Description
Keywords
隨機動態存取記憶體
,
高介電常數
,
薄膜
,
電容器
,
濺鍍
,
DRAM
,
High dielectric constant
,
Thin film
,
Capacitor
,
Sputtering
Citation
URI
https://www.grb.gov.tw/search/planDetail?id=444166&docId=80433
https://ir.lib.nycu.edu.tw/handle/11536/94453
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