極平整之超薄氧化層

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超薄, 氧化層, 二氧化矽, 半導體, 閘極氧化層, Ultrathin, Oxidation layer, SiO2, Semiconductor, Gate oxide

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https://www.grb.gov.tw/search/planDetail?id=444364&docId=80480
https://ir.lib.nycu.edu.tw/handle/11536/94456

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