| Title: | 微機電系統校際整合研究---子計畫二：微小機電材料與製程技術發展與研究 Micro-Electro-Mechanical Material and Processes Development and Research |
| Authors: | 羅正忠 國立交通大學電子工程學系 |
| Keywords: | 微機電系統;微感測器;微致動器;微元件;MEMS;Micromaching;Microsensor;Microactuator;Microdevice |
| Issue Date: | 1996 |
| Gov't Doc #: | NSC85-2215-E009-030 |
| URI: | http://hdl.handle.net/11536/96074 https://www.grb.gov.tw/search/planDetail?id=234537&docId=43046 |
| Appears in Collections: | Research Plans |
