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Browsing by Author "CHEN Yu-Chang"

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    METHOD OF GROWING DIAMOND THIN FILM
    (2014-07-31)
    CHANG Li
    ;
    CHEN Yu-Chang
    ;
    CHEN Jr-Yu
    The present invention is directed to a method of growing thin film diamond. Since there are micro-grooves formed between internal grains of the heterogeneous substrate during lateral epitaxy growth, diamond seeds are allowed to be embedded in the micro-grooves; surface damage caused by scratching method or seeding method also can be prevented. As a result, a continuous diamond thin film with uniform thickness and high quality can be obtained.