Browsing by Author "Chan, M. H."

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Novel Silicon Surface Pre-Treatment (SSPT) technique for CMOS device performance boosting
(2008-01-01)
Lee, Da-Yuan
;
Chen, C. C.
;
Huang, C. H.
;
Lim, P. S.
;
Chan, M. H.
In this paper, a novel surface treatment technique using Silicon Surface Pre-Treatment (SSPT) technique to boost high performance CMOS circuit is reported. This approach provides a smooth silicon surface and extends the effective channel width to enhance device performance on both N and PMOSFET. In this work, a smooth and rounded active area (AA) surface was successfully fabricated. Using this technique, we demonstrated a significant device boost of 15% and 7% on small dimension N and PMOSFET, respectively. These achievements were demonstrated without negative impact on GOI and NBTI.