Browsing by Author "Chang, Feng-Tang"

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Cushioning the pressure vibration of a zeolite concentrator system using a decoupled balancing duct system
(2007-07-01)
Chang, Feng-Tang
;
Lin, Yu-Chih
;
工學院
;
College of Engineering
A honeycomb Zeolite Rotor Concentrator (HZRC) is the main air pollution control device utilized by many semiconductor and optoelectronics manufacturers. Various plant exhaust streams are collected and then transferred to the HZRC for decontamination. In a conventional HZRC, the exhaust fan movement and the switching between different air ducts can cause significant duct pressure variations resulting in production interruption. The minimization (of pressure fluctuations to ensure continuous operation production lines while maintaining a high volatile efficiency is organic compounds (VOCs) removal efficiency essential for exhaust treatment in these high technology manufactures. The article introduces a decoupled balancing duct system (DBDS)for controlling the airflows to achieve a balanced pressure in the HZRC system by adding a flow rate control device to the VOCs loaded stream bypass duct of a conventional system. Performance comparisons of HZRC with DBDS and other airflow control stems used by the wafer manufacturers in Hsinchu Science Park, Taiwan are presented. DBDS system had been proved effectively to stabilize the pressure in the airflow ducts, and thus avoided pressure fluctuations; it beeped to achieve a high VOCs removal efficiency while ensuring the stability of the HZRC. (c) 2007 American Institute of Chemical Engineers Environ Prog, 26: 188-196, 2007.
Optimizing operating parameters of a honeycomb zeolite rotor concentrator for processing TFT-LCD volatile organic compounds with competitive adsorption characteristics
(2009-05-30)
Lin, Yu-Chih
;
Chang, Feng-Tang
;
工學院
;
College of Engineering
In this study, we attempted to enhance the removal efficiency of a honeycomb zeolite rotor concentrator (HZRC), operated at optimal parameters, for processing TFT-LCD volatile organic compounds (VCCs) with competitive adsorption characteristics. The results indicated that when the HZRC processed a VOCs stream of mixed compounds, compounds with a high boiling point take precedence in the adsorption process. In addition, existing compounds with a low boiling point adsorbed onto the HZRC were also displaced by the high-boiling-point compounds. In order to achieve optimal operating parameters for high VCCs removal efficiency, results suggested controlling the inlet velocity to <1.5 m/s, reducing the concentration ratio to 8 times, increasing the desorption temperature to 200-225 degrees C, and setting the rotation speed to 6.5 rpm. (C) 2008 Elsevier B.V. All rights reserved.