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Browsing by Author "Chang, Jen-Hong"

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    Investigation of Hot Carrier Reliability of Ultrathin Poly-Si Nanobelt Junctionless (UTNB-JL) Transistors on Different Underlying Insulators
    (2016)
    Chang, Jen-Hong
    ;
    Chung, Chun-Chih
    ;
    Lin, Jer-Yi
    ;
    Chao, Tien-Sheng
    ;
    電子物理學系
    In this work, we investigate the hot carrier stress (HCS) of ultrathin poly-Si nanobelt junctionless transistors on different insulator (TEOS and Si3N4). Time exponent n suggests the oxide trap charge is the dominant mechanism. The subthreshold slope (S.S.) is improved by acceptor-like interface states generated after HCS, and different S.S. improvement between JL_O and JL_N is caused by surface roughness of channel films resulting from nucleation during channel deposition in LPCVD step.