Browsing by Author "Chang, Kai-Chun"

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Anodic aluminum oxide as a template for CNT field emitters and AAO-CNT triode structure
(2005)
Lin, Chen-Chun
;
Pan, Fu-Ming
;
Liu, Mei
;
Chang, Kai-Chun
;
Chen, Po-Lin
We have used anodic aluminum oxide (AAO) as the template to grow carbon nanotubes (CNTs) for the application of field-emission display technology. In order to obtain optimal field emission properties, we have tried to control the density and the length of the CNTs grown from AAO pore channels by tuning the growth time and the CH4 concentration of the precursor gas mixture. AAO pore channel arrays were grown in the triode structure, which was fabricated on silicon wafers by conventional integrated circuit processes.
Anodic-aluminum-oxide templated carbon nanotubes in the field emission triode
(2007)
Lin, Chen-Chun
;
Chang, Kai-Chun
;
Pan, Fu-Ming
;
Kuo, Cheng-Tzu
;
Liu, Mei
To fabricate the field-emission triode structure, carbon nanotubes (CNT) were used as field emitters and grown in the anodic aluminum oxide (AAO). AAO thin layer with vertical pore channels was first prepared on the Si (100) substrate and was used to template the following growth of CNTs in an electron cyclotron resonance chemical vapor deposition (ECR-CVD) system. The tetraethoxysilane (TEOS) oxide and At layer were deposited on the CAITs and acted as the dielectric layer and gate electrode layers for the triode structure, respectively. Reactive ion and wet etches were then used to open the field-emission area in the triode. Field-emission characteristics of the CNT emitters have been studied and an anode turn-on field of similar to 8.05 V/mu m was measured.
Growth of carbon nanotube field emitters in the triode structure using anodic aluminum oxide as the template
(2007-04-01)
Lin, Chen-Chun
;
Chang, Kai-Chun
;
Pan, Fu-Ming
;
Kuo, Cheng-Tzu
;
Liu, Mai
Carbon nanotubes (CNT) were grown in anodic aluminum oxide (AAO) and used as field emitters in a triode structure. To fabricate the field-emission triode structure, nanoporous anodic aluminum oxide (AAO) thin layer was first prepared on the Si(100) substrate, followed by the growth of vertically aligned carbon nanotubes in AAO pore channels by electron cyclotron resonance chemical vapor deposition (ECR-CVD). The SiO2 dielectric and Al gate electrode layers required for the triode structure were directly deposited on the CNTs. Reactive ion and wet etches were then used to open the field-emission area in the triode. Scanning electron microscopy and Raman spectroscopy studies revealed that damage to CNT emitters in the etched area was trivial. Field-emission characteristics of the CNT emitters have been studied and an anode turn-on electric field of similar to 8.05 V/mu m was measured. (C) 2007 Elsevier B.V. All rights reserved.
Mechanistic study of cobalt catalyzed growth of carbon nanofibers in a confined space by plasma-assisted chemical vapor deposition
(2009-10-01)
Lin, Chen-Chun
;
Pan, Fu-Ming
;
Chang, Kai-Chun
;
Kuo, Chuan-Wen
;
Kuo, Cheng-Tzu
Carbon nanofibers (CNFs) were grown in the porous anodic aluminum oxide (AAO) thin film grown on the Si wafer by electron cyclotron resonance chemical vapor deposition using cobalt as the catalyst. A larger Co particle electrodeposited in the AAO pore channel produced vertically aligned CNFs with a tube diameter in compliance with the pore size of the AAO template. On the other hand, a smaller Co particle resulted in CNF growth with a nonuniform distribution of the tube diameter and a sparse tube density. Amorphous carbon residue produced under the plasma-assisted CNF growth condition seemed to play an essential role leading to the observation. A growth mechanism is proposed to delineate the volume effect of the electrodeposited Co catalyst on the CNF growth confined in pore channels of the AAO template. (C) 2009 Elsevier B.V. All rights reserved.