Browsing by Author "Chang, Pei-Lin"

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Effects of supercritical fluids activation on carbon nanotube field emitters
(2007-01-01)
Liu, Po-Tsun
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Tsai, Chih-Tsung
;
Chang, Ting- Chang
;
Kin, Kon-Tsu
;
Chang, Pei-Lin
This paper proposes a novel method to enhance the emission characteristics of carbon nanotubes (CNTs). It is extremely possible for CNTs to adsorb moisture and other contaminants during the fabrication processes, leading to the degraded field emission characteristics. In., this work, CNT emitters are activated with commonly used heating process and supercritical carbon dioxide (SCCO2) fluids technology for removing adsorbed residue moisture. Experimental results have demonstrated that the electrical stability and field emission enhancement of CNT emitters are effectively achieved by the SCCO2 fluids treatment compared to the heating process, due to the minimization of residuary moisture in CNTs.
Low-temperature method for enhancing sputter-deposited HfO2 films with complete oxidization
(2007-07-02)
Tsai, Chih-Tsung
;
Chang, Ting-Chang
;
Liu, Po-Tsun
;
Yang, Po-Yu
;
Kuo, Yu-Chieh
A low-temperature method, supercritical CO2 fluid (SCF) technology, is proposed to improve the dielectric properties of ultrathin hafnium oxide (HfO2) film at 150 degrees C without significant formation of parasitic oxide at the interface between HfO2 and Si substrate. In this research, the HfO2 films were deposited by dc sputter at room temperature and post-treated by SCF which is mixed with 5 vol % propyl alcohol and 5 vol % H2O. From high-resolution transmission electron microscopy image, the interfacial oxide of SCF-treated HfO2 film is only 5 angstrom thick. Additionally, the enhancements in the qualities of sputter-deposited HfO2 film after SCF process are exhibited by x-ray photoelectron spectroscopy and capacitance-voltage (C-V) measurement. (c) 2007 American Institute of Physics.