Browsing by Author "Chang, T. Y."

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Size-Dependent Trapping Effect in Nano-Dot Non-Volatile Memory
(2011)
Tsai, C. Y.
;
Cheng, C. H.
;
Chang, T. Y.
;
Chou, K. Y.
;
Chin, Albert
We report a flash memory using deep traps nano-dot formed in ZrON charge trapping layers by As+ implantation to improve the device performance of MONOS CTF device. The TaN-[SiO2-LaAlO3]-[As+-implanted ZrON]-[LaAlO3-SiO2]-Si device shows a 6 nm ENT, a large initial memory window of 9.8 V, a 10-year extrapolated retention window of 3.6 V at 85 degrees C, and an endurance window of 5.1 V after 10(5) cycles under fast 100 mu s and low +/- 16 V program/erase. The performance of As+-implanted ZrON is significantly better than that of stacked Si3N4/Ir-dot/HfON device with poor thickness scaling due to excess Ir metal dot.