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Browsing by Author "Chang, Yee-Shin"

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    Nanomechanical characteristics of BaxSr1-xTiO3 thin films
    (2006-07-15)
    Jian, Sheng-Rui
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    Chang, Win-Jin
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    Fang, Te-Hua
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    Ji, Liang-Wen
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    Hsiao, Yu-Jen
    The nanomechanical properties of barium strontium titanate (BaxSr1-xTiO3, x=0-1) deposited on a silicon substrate were investigated using the metalorganic deposition method. The characteristics of the BaxSr1-xTiO3 thin film's crystalline structure and surface roughness were achieved by means of X-ray diffraction (XRD) and atomic force microscopy (AFM). The results indicated that as the Ba content was decreased and therefore the Sr content was increased a lower leakage current density and a smaller grain size were obtained. Also the mechanical properties such as hardness, Young's modulus and contact stress-strain were also studied by nanoindentation. (c) 2006 Elsevier B.V. All rights reserved.