Browsing by Author "Chang, Yi Edward"

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Method for forming required pattern on semiconductor substrate by thermal reflow technique
(2010-06-24)
Chang, Yi Edward
;
Chang, Chia-Ta
;
Hsiao, Shih-Kuang
The invention is disclosed that pattern on semiconductor substrate is fabricated by thermal reflow technique. Also, the pattern on semiconductor substrate having different sub-micron spacings can be fabricated by using different time for the thermal reflow technique process.