Browsing by Author "Chang, Yu Hsiang"

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Self-separated freestanding GaN grown on patterned substrate by hydride vapor phase epitaxy
(2007)
Lai, Chih-Ming
;
Liu, Wen Yu
;
Tsay, Jenq-Dar
;
Liu, Po Chun
;
Guo, Yih-Der
A freestanding Gallium Nitride bulk is obtained without using laser lift-off technology. Two techniques such as mask-less ELOG and air-bridge structure are applied on patterned substrate. A self-separated result is successfully demonstrated by using mask-less ELOG and air-bridge structure. Due to the thermal coefficient of expansion (TCE) mismatch between the GaN layer and the non-native (foreign) substrate, separation happens during cooling down after HVPE growth. Both two structures successfully help to lift GaN off the substrate. (c) 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.