Browsing by Author "Chang, Yu-Ru"

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A novel self-aligned process between a nano-aperture and a solid immersion lens for a near-field optical system
(2006-12-01)
Hsu, Hung-Lung
;
Chang, Yu-Ru
;
Chiu, Yi
;
Lin, Yu-Hsin
;
Hsu, Wensyang
For near-field optical systems, an aperture in nano-size and a solid immersion lens (SIL) are two popular methods to overcome the diffraction limit and reduce the optical spot size. In previous research, combining a nano-aperture and SIL has been proposed to provide high throughput and ultra-high resolution. However, alignment between the nano-aperture and SIL is very critical in the fabrication process, and no effective alignment technique has been investigated yet. In this research, a novel self-alignment technique is proposed for the combination of the nano-aperture and SIL, where the nano-aperture is fabricated with the focused ion beam (FIB) system and the SIL is formed by the thermal reflowing process. The self-alignment technique is based on the backside exposure and the surface tension self-modulation technique during the thermal reflowing process. The maximum deviation of the fabricated SIL is less than 3% in comparison with the designed values. A SIL of 15 mu m diameter has been measured with 65.2% transmission efficiency. The polymer SIL combined with the circular aperture of 329 nm diameter has 1.68 times enhancement on throughput compared with the circular aperture of 329 nm alone. This result shows that the SIL can effectively enhance the throughput of the nano-aperture, and the feasibility of the proposed self-alignment method is also verified.
Self-alignment manufacturing method of the microlens and the aperture using in optical devices
(2006-06-22)
Chiu, Yi
;
Hsu, Wen Syang
;
Chang, Yu-Ru
The present invention discloses a self-alignment manufacturing method of a microlens and an aperture using in an optical device. The method manufactures the aperture and the circular opening in the opaque film on a transparent substrate, and utilizes the self-alignment backside exposure technology to precisely integrate the aperture and the microlens made by macromolecule material without any combination step. The claimed method is simpler than conventional technology and can precisely align and integrate the microlens and the aperture with a continuous batch manufacture. Since the aperture and the circular opening are concentric circles and formed in same step, the microlens and the aperture can be precisely aligned with the backside exposure. The claimed invention can effectively improve the optical resolution and efficiency of the optical access and measurement devices.