Browsing by Author "Chen, Chan-Lin"

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A Simple Growth Method to Produce a-Plane GaN Thick Films by Hydride Vapor Phase Epitaxy
(2013-08-01)
Wu, Yin-Hao
;
Lee, Chuo-Han
;
Chu, Chung-Ming
;
Yeh, Yen-Hsien
;
Chen, Chan-Lin
A-plane GaN was grown on r-plane sapphire using a two-step growth method by hydride vapor phase epitaxy (HVPE). In the first step, a-plane GaN formed triangular stripes along the m-direction ([(1) over bar 100] direction) at a low growth temperature. Then, increasing the growth temperature enhanced the lateral growth mode to coalesce a-plane GaN in the second step. There were triangular voids formed after growth. In this work, a new method was developed to produce the voids in the a-plane GaN film using the two-step growth method without optical lithography. (C) 2013 The Japan Society of Applied Physics