Browsing by Author "Chen, Che Wei"

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Ge Channel MOSFETs Directly on Silicon
(2014)
Chen, Che Wei
;
Chung, Cheng-Ting
;
Chien, Chao Hsin
;
電子工程學系及電子研究所
;
Department of Electronics Engineering and Institute of Electronics
This paper presents high performance Ge/Si diode, trigate Ge PFET, junctionless trigate Ge PFET and strained Ge NFET directly on Si wafer. The leakage current of the Ge/Si diode is as low as <10(-7) A/cm(2). Trigate PFET depicts a driving current of 22 mu A/mu m at V-G = -2 V and a low OFF-current of 3 nA/mu m at V-G = 2 V. Junctionless trigate PFET shows I-ON/I-oFF ratio of similar to 6 x 10(4) ( I-D), similar to 6 x10(5) (I-s), and the remarkably low off-current of 450 pA/mu m at V-D = -0.1 V. Strained trigate Ge NFET is demonstrated.