Browsing by Author "Chen, Fu-Chian"

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Low Temperature Cu-to-Cu Direct Bonding with thin gold capping on Highly-orientated Nanotwinned Cu Films
(2019-01-01)
Chen, Fu-Chian
;
Wu, Yu-Ting
;
Chen, Chih
;
材料科學與工程學系
;
Department of Materials Science and Engineering
In this study, we capped gold on the surface of highly (111)-orientated nano-twin copper films. With the great diffusivity of (111) copper and the low activity in gold, we can achieve a lower bonding temperature.