Browsing by Author "Chen, J. S."

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Femtosecond laser processing of indium-tin-oxide thin films
(2015-06-01)
Cheng, C. W.
;
Lee, I. M.
;
Chen, J. S.
;
機械工程學系
;
Department of Mechanical Engineering
Micro- and nano-scale crystalline indium-tin-oxide (c-ITO) patterns fabricated from amorphous ITO (a-ITO) thin films on a glass substrate using a (low NA 0.26) femtosecond laser pulse that is not tightly focused are demonstrated. Different types of c-ITO patterns are obtained by controlling the laser pulse energies and pulse repetition rate of a femtosecond laser beam at a wavelength of 1064 nm: periodic micro c-ITO dots with diameters of similar to 1.4 mu m, two parallel c-ITO patterns with/without periodic-like glass nanostructures at a laser scanning path and nano-scale c-ITO line patterns with a line width similar to 900 nm, i.e. similar to 1/8 of the focused beam\'s diameter (7 mu m at 1/e(2)). (C) 2015 Elsevier Ltd. All rights reserved.
Femtosecond laser-induced nanoperiodic structures and simultaneous crystallization in amorphous indium-tin-oxide thin films
(2014-10-15)
Cheng, C. W.
;
Lee, I. M.
;
Chen, J. S.
;
機械工程學系
;
Department of Mechanical Engineering
Fabrication of crystalline indium-tin-oxide (c-ITO) nanogratings and smooth line patterns on amorphous ITO (a-ITO) thin films by femtosecond laser-induced structuring and simultaneous crystallization followed by chemical etching is demonstrated. Three types of c-ITO structures are obtained merely by controlling the laser pulse energy of a high-repetition rate femtosecond laser at wavelength 532 nm: nanogratings perpendicular to laser polarization direction with period of 130 perpendicular to 11 nm, smooth c-ITO line patterns as well as nanogratings parallel to laser polarization direction with period of 390 +/- 10 nm. Large area c-ITO patterns and nanograting structures are fabricated, which are expected to be used in optoelectronic and micro-electronic devices. (C) 2014 Elsevier B.V. All rights reserved.