Browsing by Author "Chen, Mei-Yung"
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Item type:Item, A New Design of a Submicropositioner Utilizing Electromagnetic Actuators and Flexure Mechanism(2010-01-01) ;Chen, Mei-Yung ;Huang, Hsuan-Han ;Hung, Shao-Kang ;機械工程學系Department of Mechanical EngineeringIn this paper, a novel XY-dimensional submicropositioner, including mechanism, control, and analysis, is successfully presented. The design of the submicropositioner utilizes a monolithic parallel flexure mechanism with built-in electromagnetic actuators and optical sensors to achieve the object of 3-DOF precise motion. From the provided experimental results, there are several main goals that have been achieved in this paper: 1) to integrate the electromagnetic actuator and the parallel flexure mechanism for planar positioning system; 2) to establish the mathematical modeling; 3) to develop an advanced adaptive sliding-mode controller; and 4) to perform extensive experiments to test the realistic performance.Item type:Item, Design and Experiment of a Macro-Micro Planar Maglev Positioning System(2012-11-01) ;Chen, Mei-Yung ;Lin, Tzuo-Bo ;Hung, Shao-Kang ;Fu, Li-Chen交大名義發表In this paper, a new planar magnetic levitation (maglev) positioning system is proposed, which is capable of executing dual-axis planar motions purely involving magnetic forces. Functionally, such a mechanism behaves like a planar XY table with micrometer precision. Specifically, in this system, a new structure with an adaptive sliding-mode control (ASMC) algorithm is described, which aims to achieve the following three goals: 1) a large moving range (millimeter level); 2) precise positioning (micrometer level); and 3) fast response. The system consists of a moving carrier platform, six permanent magnets (PMs) attached to the carrier, and six electromagnets mounted on a fixed base. After exploring the characteristics of the magnetic forces between PMs and electromagnets, the general 6-DOF dynamic model of this system is derived and analyzed. Then, because of the naturally unstable behavior inherent in maglev systems, the proposed ASMC guarantees satisfactory performance of the maglev system. Experiments have successfully demonstrated the feasibility and effectiveness of the overall system.