Browsing by Author "Chen, Shine-China"

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Improving electrical characteristics of high-k NiTiO dielectric with nitrogen ion implantation.
(2006-09-01)
Yang, Wen-Luh
;
Chao, Tien-Sheng
;
Chen, Shine-China
;
Yang, Chin-Hao
;
Peng, Wu-Chin
A new high-dielectric-constant (k) NiTiO dielectric film with a low temperature has been investigated for the first time. The k of the NiTiO film was estimated to be larger than 40. The roughness of the NiTiO dielectric film to nitrogen ion implantation (I/I) was uniform, thus causing a low leakage current (< 10(-9) A) and a high breakdown voltage (> 25 MV/cm(2)). These results are superior to those reported in the literature, suggesting a potential use of the NiTiO film as dielectric for future RF/mixed IC applications.