Browsing by Author "Chen, Wen Jauh"

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High-performance SrTiO3 MIM capacitors for analog applications
(2006-09-01)
Chiang, K. C.
;
Huang, Ching-Chien
;
Chen, G. L.
;
Chen, Wen Jauh
;
Kao, H. L.
TAN/SrTiO3/TaN capacitors with a capacitance density of 28-35 fF/mu m(2) have been developed by using a high-kappa (kappa = 147-169) SrTiO3 dielectric containing nanometersized microcrystals (3-10 nm). A small capacitance effective thickness was achieved by reducing the interfacial TaON using N+ treatment on the lower TaN electrode during post-deposition annealing. The small (92 ppm/V-2) voltage coefficient of the capacitance and the 3 x 10(-8) A/cm(2) leakage current at 2 V exceed the International Technology Roadmap for Semiconductors' requirements for analog capacitors at year 2018.