<link rel="stylesheet" href="styles.cf390c6bfbe7555f.css">

Browsing by Author "Chen Jenn-Fang"

Now showing 1 - 1 of 1
  • Thumbnail Image
    Item type:Item,
    Manufacture method of a multilayer structure having non-polar a-plane {11-20} III-nitride layer
    (2011-07-19)
    Lee Wei-I
    ;
    Chen Jenn-Fang
    ;
    Chiang Chen-Hao
    A manufacture method of a multilayer structure having a non-polar a-plane {11-22} III-nitride layer includes forming a nucleation layer on a r-plane substrate, wherein the nucleation layer is composed of multiple nitride layers; and forming a non-polar a-plane {11-20} III-nitride layer on the nucleation layer. The nucleation layer features reduced stress, reduced phase difference of lattice, blocked elongation of dislocation, and reduced density of dislocation. Thus, the non-polar a-plane {11-20} III-nitride layer with flat surface can be formed.