Browsing by Author "Chen Yu-Chung"

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METHOD OF SEMICONDUCTOR MANUFACTURING PROCESS
(2013-01-03)
Wu YewChung Sermon
;
Chen Yu-Chung
The present invention related to a method for manufacturing a semiconductor, comprising steps of: providing a growing substrate; forming on the growing substrate to have plural grooves; forming a semiconductor element layer on the growing substrate; and changing the temperature of the growing substrate and the semiconductor element layer so as to separate the semiconductor element layer from the growing substrate.