Browsing by Author "Cheng, Chia-Chu"

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Epitaxial GaAs and pHEMT on aluminum-transformed AlAs nanofilms
(2018-09-01)
Cheng, Chia-Chu
;
Wu, Chu-Chun
;
Fan, Yen-Ting
;
Wu, Jenq-Shinn
;
Lin, Sheng-Di
Heterogeneous epitaxial growth between semiconductors and metals boosts novel device development and enables various applications. In this work, we have investigated the epitaxial growth of GaAs layers on top of a nanoscale aluminium-transformed AlAs film. The grown GaAs layers are single-crystalline and of highquality, that has been evidenced by using various material characterization methods and by fabricating their high-electron mobility transistors. We found that an intriguing process named as "arsenidation" of aluminium film plays a key role in the successful epitaxy. Our work opens a window for growing semiconductor/metal hetero-structures for various device applications in the future. (C) 2018 Author(s).
High-quality GaAs grown on aluminum film
(2017-01-01)
Cheng, Chia-Chu
;
Wu, Chu-Chun
;
Fan, Yen-Ting
;
Lin, Sheng-Di
;
電機學院
We have grown GaAs layers on an aluminum nanofilm by using molecular beam epitaxy. Defect-free GaAs and InAs quantum dots are investigated with X-ray diffraction, transmission electron microscopy, and room-temperature photoluminescence.