Browsing by Author "Chien, YE"

Now showing 1 - 1 of 1

Microlens array fabricated by excimer laser micromachining with gray-tone photolithography
(2003-03-01)
Tien, CH
;
Chien, YE
;
Chiu, Y
;
Shieh, HPD
;
光電工程學系
We demonstrate the fabrication of a refractive microlens array by using 249nm excimer laser micromachining with coded gray-tone mask photolithography. With pre-corrections to the nonlinear exposure process, the maximum deviation from the designed shape was below 5%. The fabricated hemispherical lens of 30 mum radius was used as a solid immersion lens (SIL) and combined with a 0.54 numerical aperture (NA) objective to achieve a 0.87 effective NA through the knife-edge scanning test. The. experimental results agreed with those of the simulation. Unlike the methods such as the thermal melting process, this one-step optical exposure method with a coded mask provides a relatively fast and cost-effective way to realize a microlens array in optical data storage, information processing, and optical interconnection applications.