Browsing by Author "Chih-Wei CHEN"

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BIOLOGICAL SENSING SYSTEM
(2018-04-19)
Jeng-Tzong SHEU
;
Chih-Wei CHEN
Provided is a biological sensing system, including a nanowire field-effect transistor and a sensing chip. A gate terminal of the nanowire FET surrounds a gate of a silicon nanowire or a gate of a silicon nanobelt, diameter of the silicon nanowire is less than 20 nm. A sensing electrode of the sensing chip is coupled to the gate terminal of the nanowire FET. An area ratio of an electrode area of the sensing electrode to a total sensing chip area, a thickness ratio of an oxide thickness of sensing electrode to a bulk oxide dielectric film thickness of the sensing chip and a capacitance ratio of an electrode capacitor of the sensing electrode to a gate capacitor of the silicon nanowire or a gate capacitor of the silicon nanobelt are optimized by means of an equivalent circuit so that potential coupling efficiency between sensing electrode and gate is optimized.