Browsing by Author "Chiou, Jin-Chen"

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Design, fabrication and actuation of four-axis thermal actuating image stabiliser
(2011-07-01)
Lin, Chun-Ying
;
Chiou, Jin-Chen
;
電控工程研究所
;
Institute of Electrical and Control Engineering
Presented is a microelectromechanical system-based thermal actuating image stabiliser. The proposed stage has dimensions of 14.9 x 14.9 x 0.2 mm(3) and contains a four-axis decoupling XY stage used for anti-shaking. The processes used to fabricate the stabiliser include silicon on isolator process, inductively coupled plasma process and flip-chip bonding technique. The maximum actuating distance of the stage is larger than 25 mu m, which is sufficient to resolve the shaking problem in 3 x optical zoom condition. According to the experiment results, the supplied voltage for the 25 mu m moving distance is lower than 20 V, and the dynamic resonant frequency of the actuating device is 4.7 kHz.