Browsing by Author "Chiu, Kuo-Jung"

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Novel EBSD preparation method for Cu/Sn microbumps using a focused ion beam
(2012-12-01)
Liu, Tao-Chi
;
Chen, Chih
;
Chiu, Kuo-Jung
;
Lin, Han-Wen
;
Kuo, Jui-Chao
We proposed a novel technique developed from focused ion beam (FIB) polishing for sample preparation of electron backscatter diffraction (EBSD) measurement. A low-angle incident gallium ion beam with a high acceleration voltage of 30 kV was used to eliminate the surface roughness of cross-sectioned microbumps resulting from mechanical polishing. This work demonstrates the application of the FIB polishing technique to solders for a high-quality sample preparation for EBSD measurement after mechanical polishing. (C) 2012 Elsevier Inc. All rights reserved.